			Volume 5, Number 1, March 2005 (ISSN 1598-1657)


			SPECIAL ISSUE ON MICROTRANSDUCER TECHNOLOGIES

			Foreword ······················································································································································· Kukjin Chun	i
			Editorial ························································································································································· Euisik Yoon	ii

			Microsystems for Whole Blood Purification and Electrophysiological Analysis································································· ···············································································Arum Han, Ki-Ho Han, Swomitra K. Mohanty, and A. Bruno Frazier	1
			Polymer/Metal Based Flexible MEMS Biosensors for Nerve Signal Monitoring and Sensitive Skin·································· ············································································································Yong-Ho Kim, Eun-Soo Hwang, and Yong-Jun Kim	11
			Simulation of Piezoelectric Dome-Shaped-Diaphragm Acoustic Transducers····································································· ······································································································································Cheol-Hyun Han and Eun Sok Kim	17
			Silicon Nitride Cantilever Arrays Integrated with Si Heater and Piezoelectric Sensors for SPM Data Storage Applications ······················································································································Hyo-Jin Nam, SeongSoo Jang,Young-Sik Kim, ··················································································Caroline Sunyong Lee, Won-Hyeog Jin, Il-Joo Cho, and Jong-Uk Bu	24
			Fabrication of Electrochemical Sensor with Tunable Electrode Distance············································································· ················································································································································Yuheon Yi and Je-Kyun Park	30
			Investigation of Pyrolyzed Polyimide Thin Film as MEMS Material················································································· ····················································Keisuke Naka, Hideki Nagae, Masao Ichiyanagi, Ok Chan Jeong, and Satoshi Konishi	38
			Characteristics of Surface Micromachined Pyroelectric Infrared Ray Focal Plane Array···················································· ··························Sang-Ouk Ryu, Seong Mok Cho, Kyu-Jeong Choi, Sung-Min Yoon, Nam-Yeal Lee, and Byoung-Gon Yu	45
			Fabrication of Circular Diaphragm for Piezoelectric Acoustic Devices················································································ ······························································Woon Seob Lee, Yong Chul Kim, Jin Seung Lee, Seok Woo Lee, and Seung S. Lee	52
			Wafer Level Vacuum Packaged Out-of-Plane and In-Plane Differential Resonant Silicon Accelerometers for Navigational Applications·········································································································································································· ····························································Illhwan Kim, Seonho Seok, Hyeon Cheol Kim, Moon Koo Kang, and Kukjin Chun	58

			Call Papers on September 2005 Special Issue on Semiconductor Devices	67
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