Volume 4, Number 3, September 2004 (ISSN 1598-1657)
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High -Rate Laser Ablation For Through-Wafer Via Holes in SiC Substrates and GaN/AlN/SiC Templates ······················ ················································S. Kim, B. S. Bang, F. Ren, J. d'Entremont, W. Blumenfeld, T. Cordock, and S. J. Pearton
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