Volume 2, Number 4, December 2002(ISSN 1598-1657)
SPECIAL ISSUE ON MEMS
Editorial······································································································ Joug Uk Bu
i
237
Piezoelectric PZT Cantilever Array Integrated with Piezoresistor for High Speed Operation and Calibration of Atomic Force Microscopy ·····················································
Hyo-Jin Nam, Young-Sik Kim, Seong-Moon Cho, Caroline Sunyong Lee, Jong-Uk Bu, and Jae-Wan Hong
246
A Study on the Passive Microvalve Applicable to Drainage Device for Glaucoma
····················································· Tae Seok Sim and Yong-Kweon Kim
253
3D Lithography using X-ray Exposure Devices Integrated with Electrostatic and Electrothermal Actuators
·············································· Kwang-Cheol Lee and Seung S. Lee
259
Fabrication of 3D Microstructures with Single uv Lithography Step············Man Hee Han, Woon Seob Lee, Sung-Keun Lee, and Seung S. Lee
268
The Active Dissolved Wafer Process (ADWP) for Integrating Single Crystal Si MEMS with CMOS Circuits ··········································Karl J. Ma, Yogesh B. Gianchandani, and Khalil Najafi
273
Fabrication Uncertainty and Noise Issues in High-Precision MEMS Actuators and Sensorsl
········································· Young-Ho Cho, Won Chul Lee, and Ki-Ho Han
280
A 32 by 32 Electroplated Metallic Micromirror Array
············································Jeong-Bong Lee
288
Solenoid Type 3-D Passives(Inductors and Trans formers) For Advanced Mobile Telecommuni-cation Systems ·····························Jae Y. Park and Jong U. Bu
295
Call Papers on March 2003 Special Issue on Compound Semiconductor
302
Copyright ¨Ï 2002 Institute of Electronics Engineers of Korea All rights reserved.