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	Volume 1, Number 4, December 2001(ISSN 1598-1657)

	JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE


	Fabrication Process
	Mechanisms of Cl₂ Molecules Dissociation in a Gas Discharge Plasma in Mixtures with Ar, O₂, N₂..............................................................A. M. Efremov and Kwang-Ho Kwon	197
	Electrical and Chemical Properties of ultra thin RT-MOCVD Deposited Ti-doped Ta₂O₅ ......... .....S.J. Lee, H.F. Luan, A. Mao, T,s, Jeon, C.H. Lee, Y. Senzaki, D. Roberts, and D.L. Kwong	202

	Devices
	Frequency-Dependent Line Capacitance and Conductance Calculations of On-Chip Interconnects on Silicon Substrate Using Fourier Cosine Series Approach.............................. .................H. Ymeri, B. Nauwelaers, S Vandenberghe, L. Maex, D. De Roest, and M. Stucchi	209

	Circuits
	Antifuse Circuits and Their Applications to Post-Package of DRAMS ..................................... .........Jae-Kyung Wee, Jeong-Hoon Kook, Se-Jun Kim, Sang-Hoon Hong, and Jin-Hong Ahn	216

	MEMS
	A Photosensitive Glass Chip for DNA Purification o Nucleic Acid Probe Assay ........................ ............................................Joon-Ho Kim, Byung-Gyun Kim, Jun-Bo Yoon and Euisik Yoon	232
	Micro-Imaging Techniques for Evaluation of Plastic Microfluidic Chip .................................... ..........................Jung Kyung Kim, Hyunwoo Bang, Yongku Lee, Chanil Chung, Jung Yul Yoo, Sang Sik Yang, Jin Seung Kim, Sekwang Park, Jun Keun Chang	239

	Adjustable-Performance, Single-Ended Input Double-Balanced Mixer .................................... ...........................................................Jin-Yong Choi, Kyung-Ho Lee, and Sang-Gug Lee	248



	Copyright ⓒ 2001 Institute of Electronics Engineers of Korea All rights reserved.